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TEL Alpha 8SB
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CVD system, 8"
Process: HTO
System Controller: TS-4000ZC
Heater Type: VMM-40-101
Process Gases: Pure N2, SiH4, N2O
System Direction: LL
Operating Temp.: 600¨¬C ~ 820¨¬C
(Qty 50) Production wafer
SMIF: None
Ratio-Mix T/C Type: Use (L type)
Fork Sensor: Installed
Variable Pitch Changing
Boat Rotation
Notch Alignment Mechanism
Vacuum Pressure Controller: N2 Ballast
Main Valve: Cylinder Valve
Boat: 64 Slots Ring
Carrier Type: KA200-81MF-47C02
Carrier Stage: 16
Fork Type: 1+4
Fork Material: Al2O3
Standard base plate
Standard L angle
2000 vintage.

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enterk@ssenp.co.kr
031.935.0452
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607-017205-01-013
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